3-09-3

[3-09-3-06] Effects of the Gas Flow Rates on the CVD Process for Large-sized Silica Glass Synthesis

*Chengshuai Li¹, Qianli Ma², Haisheng Fang¹ (1. Huazhong University of Science & Technology, 2. Hubei Feilihua Quartz Glass Co., Ltd)

キーワード：Silica glass, Chemical vapor deposition, Gas flow rate, Reactive flow, Numerical simulation