*Riku Shimaura1, Makoto Kashiwagi2, Yuichiro Yamashita3, Takashi Yagi4, Yuki Oguchi5, Naoyuki Taketoshi6, Yuzo Shigesato7
(1. Aoyama gakuin University, 2. Aoyama gakuin University, 3. National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), 4. National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), 5. Aoyama gakuin University, 6. National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), 7. Aoyama gakuin University)
キーワード:WO3 film, thermal conductivity, amorphous, polycrystalline, dc magnetron sputtering