[2P1001-29-20] The effect of film structure on the thermal conductivity for Al2O3 thin films prepared by sputtering method
キーワード:Thermal Conductivity, thin film, sputtering method, Al2O3
Poster Presentation
Poster
2022年9月27日(火) 15:00 〜 17:00 Room P (Zoom room P1)
キーワード:Thermal Conductivity, thin film, sputtering method, Al2O3