The 13th Asian Thermophysical Properties Conference(ATPC2022)

講演情報

印刷

Oral Presentation

OS4

OS4-2

2022年9月28日(水) 10:50 〜 12:30 Room 1 (Zoom room 1)

Chair:Yasuyuki Yamamoto(National Institute of Advanced Industrial Science and Technology, Japan)

11:20 〜 11:50

[OS4-2-02] [Invited]Principle and application of the micro-beam MEMS sensor

*Yoko Tomo1, Hiroshi Takamatsu2 (1. Kyushu University, Stanford University, 2. National Institute of Technology (KOSEN) Kumamoto College)

キーワード：Thermal Conductivity, MEMS, liquid, micro-TCD