CLEO-PR2022/ISOM'22/ODF'22

講演情報

印刷

Oral Session

CLEO-PR2022 » Micro/Nano Optical Sensors

[CThA17D] Micro/Nano Optical Sensors

2022年8月4日(木) 11:00 〜 12:00 Room 104&105 (1F)

Session Chairs: Keiichiro Kagawa (Shizuoka Univ.), Norimichi Tsumura (Chiba Univ.)

11:00 〜 11:15

[CThA17D-01] A design of high NA reflectie objective for DUV micro-spectroscopy

*Hikaru Takehara1, Keiji Sasaki1, Atsushi Taguchi1 (1. Hokkaido Univ. (Japan))

[Presentation Style] Onsite

Reflective objective is widely used for DUV micro-spectroscopy, however, the NA of reflective objective is limited typically up to 0.6. We designed DUV reflective objective with NA as high as 1.30 using glycerin as immersion.