[CThP12D] Hybrid Material Integration for Silicon Photonics II

[CThP12D-05] High Quality Factor Deuterated Silicon-Rich Nitride Micro-Ring Resonators

*Xavier Xujie Chia¹, Peng Xing¹, Ju Won Choi¹, Dawn Tse Hui Tan^1,2 (1. Singapore Univ. of Tech. and Design (Singapore), 2. A*STAR Inst. of Microelectronics (IME) (Singapore))

[Presentation Style] Online

Micro-Ring Resonators were fabricated on Deuterated Silicon-Rich Nitride films and characterised. Fabricated devices yield intrinsic quality factors of up to 127,000 and propagation losses of less than 2 dB/cm.