Tu-2: GaN-2 & WBG

△ [Tu2-3] Microstructural Analysis of Thick AlN Films Grown on NPSS Using Cross-Sectional and Plan-View Transmission Electron Microscopy

*Yudai Nakanishi¹, Takeaki Hamachi¹, Yoshitaka Nakajima², Yusuke Hayashi¹, Tetsuya Tohei¹, Shiyu Xiao³, Kananko Shojiki³, Hideto Miyake³, Akira Sakai¹ (1. Grad. Sch. Eng. Sci., Osaka Univ., 2. R3 INSD., Osaka Univ. , 3. Grad. Sch. Eng., Mie Univ.)