We-P: Poster-2

△ [WeP-16] Investigation on Evolution of Basal Plane Dislocation in 4H-SiC Films via Molecular Dynamics

*Haonan Chen¹, Junyong Kang¹, Yongqiang Sun¹, Xinlu Chen¹, Wenyu Kang¹, Wei Lin¹ (1. Xiamen University)