Th-2: SiC-2

[Th2-3] Strain Evolution in N and Al Ion Implantation Doping in 4H-SiC Epilayers

*Xuan Zhang¹, Jiaxu Gao², Liguo Zhang¹, Xiang Kan¹, Tao Ju¹, Baoshun Zhang¹, Dan Fang² (1. Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences, 2. Changchun University of Science and Technology)