Heterogeneous Epitaxy and Integration

[TH-PS-48] Direct Growth of GaSb on Ge, Ge-on-Si and SiGe-on-Si Platforms for Integrated Mid Infra-Red Photonics

〇Milan SILVESTRE^1,2, Jean-Baptiste Rodriguez¹, Stefano Calcaterra³, Giovanni Isella³, Eric Tournié^1,4 (1. Univ. of Montpellier (France), 2. RIBER SA (France), 3. Politecnico di Milano (Italy), 4. Institut Universitaire de France (France))