The 24th Congress of the International Commission for Optics

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Oral Presentation

05: Advanced Microscopy and Spectroscopy

[F1J] Ultrafast/Adaptive Imaging

Fri. Aug 25, 2017 9:10 AM - 11:25 AM Room J (COMET) (43F)

Session Chair:M. Booth(Univ. of Oxford), S.-W. Chu(National Taiwan Univ.)

9:55 AM - 10:10 AM

[F1J-03] Critical dimension measurement of a cross-sectional particle in the resonance domain on the substrate

○T. Hoshino 1, N. Watanabe 1, S. Aoki 1, K. Sakurai 2, M. Itoh 1 (1.Univ. of Tsukuba (Japan), 2.NIMS (Japan))

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