The 24th Congress of the International Commission for Optics

講演情報

印刷

Oral Presentation

15: Optical MEMS and Micro-optics

[Th2G] Optical MEMS and Nanophotonics II

2017年8月24日(木) 13:00 〜 15:00 Room G (ORION) (43F)

Session Chair:A. Higo(Univ. of Tokyo), K. Takahashi(Toyohashi Univ. of Tech.)

14:15 〜 14:30

[Th2G-04] A MEMS Fabry-Perot Interferometric Surface Stress Sensor for Chemical Sensing

○S. Maruyama 1, T. Hizawa 1, K. Takahashi 1, K. Sawada 1 (1.Toyohashi Univ. of Tech. (Japan))

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