B-4 Nano-scale surface finishings

[B-4-6] Effects of ultrasonic vibration on slurryless electrochemical mechanical polishing of 4H-SiC (0001) surface

〇Xiaozhe Yang¹、Xu Yang¹、Kentaro Kawai¹、Kenta Arima¹、Kazuya Yamamura¹ (1.Osaka University)

キーワード：Polishing、slurryless、ultrasonic-assisted electrochemical mechanical polishing、ultrasonic vibration.