D-1 Nano-scale measurements and calibrations

[D-1-11] Calibration of Rotary Encoder Mounted on Non-Contact Three Dimensional Nano-profiler Using Normal Vector Tracing Method

〇Kota Hashimoto¹、Mikiya Ikuchi¹、Takeshi Ashizawa¹、Katsuyoshi Endo¹ (1.Osaka University)

キーワード：Measurement、Rotary Encoder、Calibration、Three Dimensional Profiler、Uncertainty