The 39th International Conference of Photopolymer Science and Technology

セッション情報

Directed Self Assembly (DSA)

[1A301-05] Directed Self Assembly (DSA)

2022年6月28日(火) 14:00 〜 16:00 Directed Self Assembly (DSA) (A3)

Chairman:Seiji Nagahara(Tokyo Electron Ltd.), Teruaki Hayakawa(Tokyo Institute of Technology)

15:00 〜 15:20

*Lander Verstraete1, Hyo Seon Suh1, Julie Van Bel1, Philippe Bezard1, Waikin Li1, Purnota Hannan Timi1, Nadia Vandenbroeck1, Roberto Fallica1, Andreia Santos2, Shinji Miyazaki3, Boaz Alperson4, YoungJun Her5, Carmen Popescu6, Alexandra McClelland6, Alex Robinson6 (1. imec, Kapeldreef 75, 3001 Leuven, Belgium, 2. SCREEN SPE Germany, Fraunhoferstrasse 7, D-85737 Ismaning, Germany, 3. Merck electronics LTD, 3330 Chihama, Kakegawa-shi, Shizuoka 437-1412, Japan, 4. EMD performance materials Corp. 70 Meister Avenue Somerville, new Jersey 08876, USA, 5. Merck Chemicals NV, 75 Kapeldreef, Heverlee 3001, Belgium, 6. Irresistible Materials, Birmingham Research Park, Birmingham, UK)