10:40 〜 11:00
*Michael J Eller1, Jander Cruz1, Dmitriy S Verkhoturov2, Stanislav V. Verkhoturov2, Emile A Schweikert2 (1. California State University Northridge, 2. Texas A&M University)
EUV Lithography
2022年6月29日(水) 10:40 〜 12:00 EUV Lithography (A5)
Chairman:Taku Hirayama(HOYA Corp.), Hiroaki Oizumi(GIGAPHOTON Inc.)
10:40 〜 11:00
*Michael J Eller1, Jander Cruz1, Dmitriy S Verkhoturov2, Stanislav V. Verkhoturov2, Emile A Schweikert2 (1. California State University Northridge, 2. Texas A&M University)
11:00 〜 11:30
*Toru Fujimori1 (1. FUJIFILM Corporation)
11:30 〜 12:00
Hiroto Kudo1, *Yutaro Iwashige1, Kazumasa Okamoto2, Takahiro Kozawa2 (1. Kansai Univ., 2. Osaka Univ.)