The 39th International Conference of Photopolymer Science and Technology

講演情報

印刷

Directed Self Assembly (DSA)

[1A301-05] Directed Self Assembly (DSA)

2022年6月28日(火) 14:00 〜 16:00 Directed Self Assembly (DSA) (A3)

Chairman:Seiji Nagahara(Tokyo Electron Ltd.), Teruaki Hayakawa(Tokyo Institute of Technology)

14:00 〜 14:40

[1A301] DSA and Patterning Ecosystem Enablement [Keynote Lecture]

*Chandra Sarma1 (1. Intel Corp)