The 39th International Conference of Photopolymer Science and Technology

講演情報

印刷

EUV Lithography

[2A501-04] EUV Lithography I

2022年6月29日(水) 09:00 〜 10:40 EUV Lithography (A5)

Chairman:Takeo Watanabe(University of Hyogo), Shinji Yamakawa(University of Hyogo)

10:00 〜 10:30

[2A503] Advances in high NA EUV patterning and fundamental radiation chemistry diagnostics [Invited]

*Patrick Naulleau1 (1. Lawrence Berkeley National Laboratory)