The 39th International Conference of Photopolymer Science and Technology

講演情報

印刷

EUV Lithography

[2A505-07] EUV Lithography II

2022年6月29日(水) 10:40 〜 12:00 EUV Lithography (A5)

Chairman:Taku Hirayama(HOYA Corp.), Hiroaki Oizumi(GIGAPHOTON Inc.)

10:40 〜 11:00

[2A505] Nanometrology for evaluating EUV resists for molecular homogeneity and rare sites

*Michael J Eller1, Jander Cruz1, Dmitriy S Verkhoturov2, Stanislav V. Verkhoturov2, Emile A Schweikert2 (1. California State University Northridge, 2. Texas A&M University)