ICSCRM2019

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Poster Presentation

Poster Presentation

[Mo-P] Poster Presentation

Mon. Sep 30, 2019 3:45 PM - 5:45 PM Annex Hall 1 (Kyoto International Conference Center)

3:45 PM - 5:45 PM

[Mo-P-37] Characterization of 4H-SiC MOS Capacitors with Different Metal Gates after 400°C High-Temperature Aging Tests

*Cuong Van Vuong1, Seiji Ishikawa2, Tomonori Maeda2, Hiroshi Sezaki 2, Shin-Ichiro Kuroki 1 (1. Hiroshima University(Japan), 2. Phenitec Semiconductor Corp(Japan))