[Th-2A] Device Processing

[Th-2A-02] Current transport mechanisms in Au-free metallizations for CMOS compatible GaN HEMT technology

*Fabrizio Roccaforte¹, Monia Spera^1,2,3, Salvatore Di Franco¹, Corrado Bongiorno¹, Raffaella Lo Nigro¹, Patrick Fiorenza¹, Filippo Giannazzo¹, Giuseppe Greco¹ (1. CNR-IMM(Italy), 2. University of Catania(Italy), 3. University of Palermo(Italy))