[Th-P] Poster Presentation

[Th-P-16] Defect Detection in SiC Device Processes using a Mirror Electron Microscope Inspection System

*Keiko Masumoto¹, Junji Senzaki¹, Masaki Hasegawa², Kentaro Ohira², Kazutoshi Kojima¹, Kenji Kobayashi², Hajime Okumura¹ (1. National Inst. of Advanced Indus. Sci. and Tech.(Japan), 2. Hitachi High-Technologies Corp.(Japan))