*Xiao Chuan Deng1, Hao Zhu1, Xuan Li1, Xiao Jie Xu1, Kun Zhou2, Zhi Qiang Li2, Bo Song3, You Run Zhang1, Bo Zhang1
(1. University of Electronic Science and Technology of China(China), 2. China Academy of Engineering Physics(China), 3. Nanjing Electronic Device Institute(China))