スケジュール 3 16:15 〜 18:15 [Tu-P-16] TEM Studies on The Microstructure of m-face Grown 4H-SiC by Solution Growth *Junro Takahashi1, Kotaro Kawaguchi2, Kazuhiko Kusunoki2, Tomoyuki Ueyama1, Kazuhito Kamei1 (1. NIPPON STEEL TECHNOLOGY Co., Ltd.(Japan), 2. Tohoku Univ. Graduate School of Environmental Studies(Japan))