[Tu-P] Poster Presentation

[Tu-P-28] Identifications of major and minor interface defects at C-face 4H-SiC/SiO₂ interfaces with wet oxidation

*Takahide Umeda¹, Yohei Kagoyama¹, Kazureru Tomita¹, Yuta Abe¹, Mitsuru Sometani², Mitsuo Okamoto², Tetsuo Hatakeyama², Shinsuke Harada² (1. Univ. of Tsukuba(Japan), 2. AIST(Japan))