[AMD6] Oxide TFT: Device Application

[AMD6-1(Invited)] High Performance Short Channel Oxide TFTs for Transparent Top Emission OLED TVs

*Chanki Ha¹, Eunah Heo¹, Wonbeom Yoo¹, Heungjo Lee¹, Keun-Yong Ban¹, Jonguk Bae¹, Jongwoo Kim¹ (1. LG Display (Korea))

キーワード：Oxide TFT, Short Channel Device, Transparent Top Emission OLED TV

High performance TFTs with a short channel and good uniformity are required to mass-produce transparent top emission OLED TV. The uniformity of Vth and Ion are improved by controlling effective channel length. Negative Vth shift under NBTiS conditions is improved by optimizing light shield and buffer layers.