[AMD6] Oxide TFT: Device Application

[AMD6-2(Invited)] Development of high mobility top gate IGZO-TFT for Automotive OLED display.

*Yujiro Takeda¹, Aman Mehadi¹, Shogo Murashige¹, Kazuatsu Ito¹, Izumi Ishida¹, Shinji Nakajima¹, Hiroshi Matsukizono¹, Naoki Makita¹ (1. SHARP Corporation (Japan))

キーワード：Oxide-TFT, High mobility, Top gate, Reliability, OLED

High performance IGZO-TFT with top gate structure was developed for automotive OLED display backplane. By optimizing the process conditions, we achieved the mobility of 32 cm²/Vs with enhanced threshold voltage. The PBT/NBT/NBIT reliability are good enough to use in OLED application. The prototype 12.3” flexible automotive OLED display was successfully demonstrated.