[FMC8] Advanced Material

[FMC8-2] Blackening of TFT wiring by depositing high durability film

*Keita Umemoto¹, Shin Okano, Yukiya Sugiuchi, Takeshi Ohtomo, Ichiro Shiono (1. Mitsubishi Materials Corporation (Japan))

キーワード：TFT, Low reflectivity, Wiring, High durability

Blackening of TFT wiring enables higher resolution and improved design of various kinds of displays. In this paper, we will introduce the material design concept and properties of high durability thin film for blackening of TFT wiring.