10:40 〜 11:10
[6-5] Impact of SiON tunnel layer composition on 3D NAND cell performance
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Oral Presentation
2019年5月15日(水) 08:30 〜 11:10 IMW2019
Session Chairs: Antonio Arreghini, IMEC, Tomoya Sanuki, Toshiba Memory
10:40 〜 11:10
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