Oral Presentation
1.Fundamentals of Sputtering and Plasma Processes
Wed. Jul 3, 2024 10:40 AM - 12:30 PM Room O (Science Hall)
10:40 AM - 11:10 AM
*Hyeong-U Kim1,2 (1. Department of Plasma Engineering, Korea Institute of Machinery & Materials (KIMM), 2. Department of Nano-mechanics, University of Science and Technology (UST))
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11:10 AM - 11:30 AM
*Peter Klein1, Jaroslav Hnilica1, Martin Ondryáš1, Vjačeslav Sochora2, Martin Učík1,3, Ján Klusoň3, Petr Vašina1 (1. Masaryk University, Brno, Czech republic, 2. SHM s. r. o., Šumperk, Czech Republic , 3. PLATIT a.s., Šumperk, Czech Republic )
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11:30 AM - 11:50 AM
*Daniel Lundin1, Ulf Helmersson1, Martin Cada2, Zdenek Hubicka2 (1. Linköping University, 2. Academy of Science of the Czech Republic)
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11:50 AM - 12:10 PM
*Thomas Schütte1, Peter Neiß1, Marius Radloff1, Hokuto Kikuchi1 (1. PLASUS GmbH)
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12:10 PM - 12:30 PM
*Thomas Gilmore1 (1. Impedans Ltd.)
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