Oral Session TH2

2024年7月5日(金) 09:00 〜 10:20 Room O (Science Hall)

+全てマイスケジュールに登録

09:00 〜 09:40

[TH2-01] (Keynote) Simulation of film growth by a digital twin of a PVD coater.

*Stephane Lucas¹, Jerome Muller¹, Pavel Moskovkin¹ (1. University of Namur & Innovative Coating Solutions (ICS))

09:40 〜 10:00

[TH2-02] Room temperature synthesis of ferroelectric Hf_1-xZr_xO₂ films under layer-by-layer approach using digitally processed DC sputtering

Daiki Yamashita¹, Yuki Takamatsu¹, Satoshi Fujiya¹, Koki Takamura¹, Shinichiro Saisho^1,2, *Hideo Isshiki¹ (1. The University of Electro-Communications, 2. Shincron Co. Ltd.)

10:00 〜 10:20

[FS1-04] Gas analysis by remote plasma emission spectroscopy, from reactive sputtering to fusion reactor control

*Dermot Monaghan Monaghan¹, Joseph Brindley¹, Kieran Massey¹, Benoit Daniel¹, Victor Bellido¹ (1. Gencoa ltd)