Sputter epitaxy of atomically flat Zn<sub>1-x</sub>Mg<sub>x</sub>O films on sapphire using 3D buffer layers fabricated at high deposition rate

Hiroki Otsuyama

09:40 〜 10:00

[AP1-02] Sputter epitaxy of atomically flat Zn_1-xMg_xO films on sapphire using 3D buffer layers fabricated at high deposition rate

*Hiroki Otsuyama¹, Kotaro Yataka¹, Takafumi Yunoue¹, Naoto Yamashita¹, Takamasa Okumura¹, Kunihiro Kamataki¹, Kazunori Koga¹, Masaharu Shiratani¹, Naho Itagaki¹ (1. Graduate School of Information Science and Electrical Engineering, Kyushu University)

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講演情報

Oral Session AP1

[AP1-02] Sputter epitaxy of atomically flat Zn_1-xMg_xO films on sapphire using 3D buffer layers fabricated at high deposition rate

パスワード

講演情報

Oral Session AP1

[AP1-02] Sputter epitaxy of atomically flat Zn1-xMgxO films on sapphire using 3D buffer layers fabricated at high deposition rate

パスワード

[AP1-02] Sputter epitaxy of atomically flat Zn_1-xMg_xO films on sapphire using 3D buffer layers fabricated at high deposition rate