Oral Session FA2

[FA2-01] (Invited) Engineered Phase Differences between HiPIMS Power and Substrate bias for Improved Mechanical Properties of TiN and CrN

*Wan-Yu Wu¹, Ying-Hsiang Lin², Po-Liang Liu², Dong-Sing Wuu^3,4 (1. Department of Materials Science and Engineering, National United University, Taiwan, 2. Institute of Precision Engineering, National Chung Hsing University, Taiwan, 3. Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, 4. Department of Materials Science and Engineering, National Chung Hsing University, Taiwan)