ISSP2024

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Oral Presentation

1.Fundamentals of Sputtering and Plasma Processes

Oral Session FS1

Wed. Jul 3, 2024 10:40 AM - 12:30 PM Room O (Science Hall)

10:40 AM - 11:10 AM

[FS1-01] (Invited) Plasma integrated System for 2D Materials

*Hyeong-U Kim1,2 (1. Department of Plasma Engineering, Korea Institute of Machinery & Materials (KIMM), 2. Department of Nano-mechanics, University of Science and Technology (UST))

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