Non-invasive diagnostics for characterizing conditions at plasma electrode during thin film growth

Presentation information

Oral Presentation

1.Fundamentals of Sputtering and Plasma Processes

Wed. Jul 3, 2024 10:40 AM - 12:30 PM Room O (Science Hall)

11:30 AM - 11:50 AM

*Daniel Lundin¹, Ulf Helmersson¹, Martin Cada², Zdenek Hubicka² (1. Linköping University, 2. Academy of Science of the Czech Republic)

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