[HP2-03] 11 years of ground state density mapping in HiPIMS: from scientific trials to industry-grade research
*Nikolay Britun1, Jaroslav Hnilicai 2, Masaru Hori1, Kazuhiro Hikida2, Kazutaka Fujiwara2(1. Center for Low-temperature Plasma Sciences, Nagoya University, 2. Mitsubishi Materials Corporation Innovation Center )
