[P4-17] The role of the magnetic field design in optimising the performance of Hipims based sputter deposition processes
*Dermot Monaghan Monaghan1, Victor Bellido-Gonzalez1, Patrick McCarthy1, Tomasso Sgrilli1, Robert Brown1, Ivan Fernandez2, Ambiorn Wennberg2(1. Gencoa ltd, 2. Nano4Energy SRL)
