Poster Session P5

[P5-06] Effect of xenon gas on deposition of diamond-like carbon film using HiPIMS

*Takayuki Ohta¹, Shiro Matsumoto¹, Keita Takeda¹, Toru Harigai², Akinori Oda³, Hiroyuki Kousaka⁴ (1. Meijo University, 2. Toyohashi University of Technology, 3. Chiba institute of Technology, 4. Gifu University)