Poster Session P5

[P5-30] Effect of carbon contents on the mechanical properties of AlCrNbSiTiBCN thin films fabricated by superimposed HiPIMS and MF sputtering technique

*TSE WEI CHEN¹, Bih Show Lou^2,3, Jyh Wei Lee^1,4,5,6 (1. Department of Materials Engineering, Ming Chi University of Technology, New Taipei, Taiwan, 2. Chemistry Division, Center for General Education, Chang Gung University, Taoyuan, Taiwan, 3. Department of Orthopaedic Surgery, New Taipei Municipal TuCheng Hospital, Chang Gung Memorial Hospital, Taiwan, 4. Center for Plasma and Thin Film Technologies, Ming Chi University of Technology, New Taipei, Taiwan, 5. College of Engineering, Chang Gung University, Taoyuan, Taiwan, 6. High Entropy Materials Center, National Tsing Hua University, Hsinchu, Taiwan)