ISSP2024

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Oral Presentation

2.Sputtering and Plasma Process Technologies

Oral Session SP1

Thu. Jul 4, 2024 1:40 PM - 3:20 PM Room O (Science Hall)

3:00 PM - 3:20 PM

[SP1-04] Massive nitrogen supersaturation to AISI316 substrate via RF/DC plasma immersion

*Tatsuhiko Aizawa1, Tatsuya Fukuda2 (1. Surface Engineering Design Laboratory, Shibaura Institute of Technology, 2. Tokai Engineering Service, Co., Ltd.)

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