*Wenjun Wu¹, Noritsugu Umehara¹, Takayuki Tokoroyama¹, Motoyuki Murashima² (1. Nagoya University, Japan, 2. Tohoku University, Japan)

*Taiga Goto¹, Woo-Young Lee², Noritsugu Umehara¹, Takayuki Tokoroyama¹, Motoyuki Murashima³ (1. Nagoya University, Japan, 2. Korea photonics Technology Instisute, Korea, 3. Tohoku University, Japan)

*Abdelrahman Abdelati¹, Takeharu Motokawa², Noriko Iida², Junho Choi¹ (1. Mechanical Engineering department, The University of tokyo, Japan, 2. Institute of Memory Technology Research & Development, Kioxia Corporation , Japan)

*Daiki Fujimoto, Kaoru Katagiri, Kazuya Kuriyagawa, Motoyuki Murashima, Koshi Adachi (Department of Mechanical Systems Engineering, Graduate School of Engineering, Tohoku University, Japan)