Molecular Dynamics 2

[28-F-01] Molecular Dynamics Simulation of Abrasive Wear of Hcp Crystal to Clarify Nanoscratch Phenomena of C-plane Sapphire Wafer

*Jun Shimizu¹, Wangpiao Lin², Naohiko Yano², Kengo Saegusa², Kazuki Kaneko¹, Libo Zhou¹, Teppei Onuki¹, Hirotaka Ojima¹, Takeyuki Yamamoto¹ (1. Ibaraki University, Japan, 2. Graduate School, Ibaraki University, Japan)

Keywords:molecular dynamics, nanoscratch, abrasive wear, anisotropy, slip system