ITC Fukuoka 2023

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Poster Session

Technical sessions » Poster Session

Poster session 3

Thu. Sep 28, 2023 10:50 AM - 12:00 PM Poster Session Room (Multipurpose Room)

10:50 AM - 12:00 PM

[28-PO-40] The Deposition of Amorphous Silicon Carbon Nitride Films Using High-density Plasma CVD

*Ippei Tanaka, Yuki Hatae, Yasunori Harada (University of Hyogo, Japan)

Keywords:SiCN, plasma, CVD

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