Improved Tribological Vacuum and Dry Air Performance of ta-C Coatings Modified with Different Process Strategies

Fabian Härtwig

Presentation information

Technical Session

Technical sessions » Advanced Tribology Material

DLC and Carbon Related Coatings 3

Fri. Sep 29, 2023 10:20 AM - 12:00 PM Room C (Room 502/503)

Takayuki Tokoroyama (Nagoya University, Japan)
Stefan Makowski (Fraunhofer Institute for Material and Beam Technology IWS, Germany)

10:20 AM - 10:40 AM

[29-C-01] Improved Tribological Vacuum and Dry Air Performance of ta-C Coatings Modified with Different Process Strategies

*Fabian Härtwig^1,2, Stefan Makowski², Lars Lorenz^1,2, Robert Baumann¹, Marcos Soldera¹, Andrés Fabián Lasagni¹, Frank Kaulfuß², Volker Weihnacht² (1. Technische Universität Dresden, Germany, 2. Fraunhofer Institute for Material and Beam Technology IWS, Germany)

Keywords:DLC, Vacuum, DLIP, MoS2

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