[Tue-D1] Joint session of Non-Evaporable Getter Coating and Vacuum Science and Technology -- Fundamental Research and Characterization

[Tue-D1-4] Hydrogen annealing and analysis in yttrium and titanium getter films

*Charlotte Kutyla^1,2, Clément Bessouet¹, Sylvain Lemettre¹, Alain Bosseboeuf¹, Philippe Coste¹, Thierry Sauvage², Olivier Wendling², Aurélien Bellamy², Piyush Jagtap³, Stéphanie Escoubas³, Christophe Guichet³, Olivier Thomas³, Johan Moulin¹ (1. C2N, center for nanoscience and nanotechnology, , Université Paris-Saclay, CNRS, UMR 9001, 91120 Palaiseau (France), 2. CEMHTI, Conditions Extrêmes et Matériaux : Haute Température et Irradiation, CNRS, UPR 3079, 45071 Orléans Cedex 2 (France), 3. IM2NP, Institut Matériaux Microélectronique Nanosciences de Provence, CNRS, UMR 7334, 13397 Marseille Cedex 20 (France))

キーワード：getter, thin films, Hydrogen, Oxidation, yttrium