[Tue-E2] ISSP / Surface Engineering

[Tue-E2-2] Using positivity to your advantage – Bipolar HiPIMS discharges and their application for plasma cleaning and coating

*Dermot Patrick Monaghan¹, Patrick McCarthy¹, Tommaso Sgrilli¹, Alex Azzopardi¹, Victor Bellido¹, Ivan Fernandez², Jose Antonio Santiago², Ambiorn Wennberg² (1. Gencoa Ltd (UK), 2. Nano 4 Energy (Spain))

キーワード：hipims, bipolar pulsed plasma, ion irradiation, rapid surface cleaning and etching, coating ion plasma assistance