<strong>"Vacuum measurement technology does not have to be fast!“ Not at all!- How the view of transient vacuum processes is made possible</strong>

Kristian Kirsch

[Tue-PO1E-12] "Vacuum measurement technology does not have to be fast!“ Not at all!- How the view of transient vacuum processes is made possible

Kristian Kirsch¹, Julian Leiber¹, Dirk Heyne¹, Sebastian Röhring¹, Andreas Trützschler¹, Michael Flämmich¹, *Klaus Bergner¹ (1. VACOM Vakuum Komponenten & Messtechnik GmbH (Germany))

キーワード：Vacuum measurement, Total pressure measurement, Partial pressure measurement, Transient vacuum processes

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講演情報

[Tue-PO1E] Poster Session (17:00-18:30) Category E

[Tue-PO1E-12] "Vacuum measurement technology does not have to be fast!“ Not at all!- How the view of transient vacuum processes is made possible