*Takahiro Ukida¹, Koichi Suzumori¹, Hiroyuki Nabae¹, Takefumi Kanda² (1. Tokyo Institute of Technology, 2. Okayama University)

*Fumio Shimizu¹, Takahiro Tsukazaki¹, Takayuki Hori¹, Kazuhiro Tanaka¹, Tomohiro Yasuda², Masahito Watanabe² (1. Kyushu Institute of Technology, 2. Nidec Tosok Corporation)

*Zhenyu Lu¹, Junhui Zhang¹, Bing Xu ¹, Qi Su², Di Wang¹ (1. The State Key Lab of Fluid Power and Mechatronic Systems, Zhejiang University, 2. China Aerospace Science and Technology Corporation)

*Di Wang¹, Junhui Zhang¹, Bing Xu¹, Zhenyu Lu¹ (1. State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University)