13:12 〜 13:28
[1C03] CONTROLS OF PITCHING AND STRAIGHTNESS ERROR MOTION OF WATER DRIVEN STAGE DURING FEED MOTION
キーワード:Water hydraulics, Pitching control, Cross-coupling control, Hydrostatic bearings, Ultra-precision machine tools
Oral Presentation
Water hydraulics
2017年10月25日(水) 12:40 〜 14:00 Room C (ACROS Fukuoka)
Chair:Kazuhisa Ito(Shibaura Institute of Technology), Kenji Suzuki(Kanagawa University)
13:12 〜 13:28
キーワード:Water hydraulics, Pitching control, Cross-coupling control, Hydrostatic bearings, Ultra-precision machine tools