[2D26-42] Poster-Pneumatics

[2D42] EVALUATION OF ENERGY CONSUMPTION OF HYBRID ELECTRIC-PNEUMATIC ULTRA-PRECISION VERTICAL POSITIONING DEVICE

*Yoshinobu TSUKIYAMA¹, Tomonori KATO¹, keita MATSUO¹ (1. Fukuoka Institute of Technology)

キーワード：Pneumatics, Energy consumption, Hybrid system, Ultra-precision positioning, Balancing cylinder